New Delhi, India: Pfeiffer Vacuum+Fab Solutions will showcase contamination management and gas abatement technologies at SEMICON India 2026, highlighting equipment and systems used to support cleaner, more reliable semiconductor manufacturing.
The company, part of the global Busch Group, will participate in SEMICON India 2026 from September 17 to 19 at Yashobhoomi in New Delhi. Pfeiffer Vacuum+Fab Solutions will be located at Hall 1, booth 945, where visitors can explore its technologies for semiconductor production.
A central focus of the company’s participation will be contamination management. Semiconductor manufacturing requires tight control of airborne molecular contamination, as unwanted particles and chemical substances can affect processes and wafer quality.
Pfeiffer will display several 3D models covering its contamination management portfolio. The technologies are designed to measure, control and remove airborne molecular contamination in semiconductor manufacturing environments.
One of the featured systems is the Ambient Multi-Port Controller (AMPC), which allows manufacturers to monitor and analyse contamination data. The information can be transferred to fab control software to support process control and optimisation.
The company will also demonstrate its APA pod analyser, which is designed to detect contamination and support FOUP cleaning efficiency. The system can also help manufacturers manage wafer Q-Time, identify potential sources of defects and maintain contamination control in cleanroom operations.
Gas abatement will form another major part of the showcase. Pfeiffer will present a 3D model of one of its gas abatement systems, which is installed directly at process tools to reduce hazardous process gases, including gases with high global warming potential.
The portfolio uses thermal, wet, dry adsorption and filtration technologies and is designed for applications including etching, chemical vapor deposition (CVD), atomic layer deposition (ALD) and EUV lithography. These systems are intended to help reduce emissions while maintaining safe and reliable production conditions.
Visitors will also be able to explore an interactive digital model of a semiconductor fabrication facility. The touch-screen experience will show how Pfeiffer technologies are deployed across different stages of production, including cleanrooms, wafer handling areas, sub-fab infrastructure and emissions treatment.
Pfeiffer’s participation comes as India’s semiconductor manufacturing ecosystem continues to expand, increasing the need for supporting technologies that address contamination, process reliability and emissions management.
Source: This article is based on an official press release issued by Pfeiffer Vacuum+Fab Solutions
Pfeiffer Vacuum+Fab Solutions to Showcase Advanced Semiconductor Technologies at SEMICON India 2026 | Pfeiffer Global
